The immigrants come from the burned-down Moria refugee camp on Lesbos. These are mainly families whose refugee status has been confirmed, German Vice Chancellor Olaf Scholz said.
The camp fire has left more than 12,000 people homeless. Greek authorities announced on Tuesday that they had relocated about 1,000 people to another camp on Lesvos.
The German plan to take in the refugees was drawn up by Chancellor Angela Merkel and Interior Minister Horst Seehofer.
The fire, which is likely to have started, has revived the debate within the European Union about responsibility for refugees. The Netherlands is prepared to accept a hundred refugees.